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Lyncée Tec ist eine innovative, dynamische und kundenfreundliche Firma mit Sitz in Lausanne, Schweiz, mit weltweiten Distributoren. Die Firma steht für ausgereifte holographische Mikroskope, aufgebaut auf der einmaligen und patententierten Digitalen Holographischen Mikroskopie (DHM®) Technologie. Neben dem Standardprodukt Portfolio offeriert Lyncée Tec auch kundenspezifische Systeme und OEM Messköpfe.
Lyncée Tec arbeitet eng mit Kompetenz Zentren von Universitäten und insbesondere mit dem Swiss Federal Institute of Technology (EPFL), Lausanne, zusammen, aus dem die Firma auch hervorgegangen ist.
Diese Nähe zur EPFL ist ein grosser Vorteil für eine High-Tech Firma wie Lyncée Tec, profitiert vom vielfältigen Know-how und Expertise, was zu einer Anzahl Patenten gehalten oder lizenziert von Lyncée Tec. Ein hochqualifiziertes Team von Physikern, Biologen und Ingenieuren in den Gebieten Optik, Mechanik, Software, sowie in Mikro- und Nanotechnologie steht für das Wissen und die Beratung in Bezug auf die technische Ausführung, inklusive Entwicklung, Herstellung, Zusammenbau, Qualitätssicherung und Verkaufssupport.
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Lyncée Tec DHMs are configured in the so-called off-axis configuration [link article Etienne]: Holograms encode the 3D topography of your sample in a unique 2D image, that can be recorded by a normal digital camera with a single camera frame acquisition. DHM perform single-shot acquisition and opens the gate of live 3D topography. (mettre image de schéma de „hors axis“ ?)
The 3D topography rate, i.e the hologram acquisition rate is only limited by the camera acquisition rate. There is no need to perform multiple acquisition of image as necessary for phase shifting and coherence scanning interferometry, or to perform lateral scanning as for laser confocal and atomic forces microscopes. It is an important strength of the Nobel prized invention of Denis Gabor.
Time resolution is the duration of the acquisition of each hologram. It is controlled and limited by the camera shutter and the laser power: enough light need to be collected to get optimal measurement quality. For application necessitating extremely high time resolution, camera acquisitions is synchronized with a laser pulses.
3D measurements are displayed and analyzed at camera rate. This enable to screen your sample by moving it laterally under the microscope objective and observing it for locating interesting details, presence of defects, of device variability on a full wafer. Being able to observe efficiently larger area of the sample, you will discover much more about your sample. (partie du film Tristan ?)
Modification of the sample topography induced by a mechanical force, chemical transformation, temperature or pressure changes, or application of a voltage can be be observe instantaneously and measured live.
Acquisition rate of non-scannning system as DHM is only limited by the frame rate of the camera. There is no other limitation.
Short acquisition time enables to capture 3D topography on moving samples, without stopping them. Displacement speed limitation is dependent of the camera shutter duration and of two conditions on the sample displacement distances during the acquisition time: (1) the sample should not move laterally over a distance larger than half of the required lateral resolution, and (2) the vertical displacement of the sample should not be more then about 100 nm. An example of on-flight measurement is the quality control of the topography of solar wafer performd directly on the convey tray. (link to application tab solar wafer) + link to speed limitation graphic in AOI inspection
and enable to achieve sub-nanometric scale measurement without marble or isolation table ! (movies video verre d’eau)
Laboratories, clean rooms and production environment surrounding noise spectrum range from a few Hz for compressors, pumps, elevators, to a few hundred of Hz for traffic and transformers and to about 20 kHz for acoustic waves. The periods of the such noises are larger than a few microseconds. Standard DHMs have acquisition time in the range of one microsecond, i.e. shorter than the timescale of movements produced by noise. Topography measurement are not affected by vibration and do not necessitate special tables with anti-vibrations damping systems. (movies DHM vibré avec verre) Note that some samples and time-lapse measurement protocols are vibration sensitive (accelerometers, gyroscopes, cells in suspension in liquid, … ). Lyncée supplies optionally anti-vibration tables.
Inclure un lien sur les spécification caméra speed and shuter ?
German version
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