Microhotplate
Thermal Deformation
MEMS microhotplate has a wide range of application in chemical & gas sensing, and temperature & humidity sensing, etc. It is usually based on a thin membrane which keeps the heater thermally isolated in order to achieve high temperature. Therefore, deformation of the membrane usually occurs at certain temperature due to thermally induced stress.
DHM® uniquely reveals membrane deformation in live, enabling characterization of the dynamical process.
Discription:
- Courtesy of: LMIS1, EPFL, Switzerland
- System used: DHM R2100
- Acquisition rate: 30 fps
- Objective: 5x
- Time scale: <1s
- Membrane size: 1 mm2
- Heater: Pt
- Live monitoring of membrane deformation
- Characterization of dynamical profile
- Membrane: Low stress LPCVD SiN
